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Processing Facilities

This site is still under construction.

Plasma Reactors

Microwave Plasma CVD Reactor (CFI)
Inductively Coupled Plasma CVD Reactor (CFI)
Hot Filament Plasma CVD Reactor
Arc Discharge Plasma CVD Reactor
Ion Implantation ICP Reactor (CFI. Bradley)

Surface Analyses

SEM (Geological Science)
TEM (Mechanical Engineering)
Nano-indentometer (Mechanical Engineering)
Raman, AFM, Fluorescence spectroscopy, XRD at SSSC
XAS at CLS and other synchrotron facilities

Magnetic Processing

Introduction

Facilities

Results

Publications